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Exceptional diamond tools for
exceptional CMP pad conditioning
Diamond CMP pad conditioners

The P.B.S.® plating process dramatically increases diamond retention due to its unique method of bonding the individual diamonds to the disk.

Product Features:
• Strong, premium quality diamond
• Strong bond between crystal and substrate
• Consistent pad conditioning
• Lowest cost of ownership
• Product certification

ATI's pad conditioners are available for all CMP equipment including:
• Applied Materials
• Ebara
• Speedfam-IPEC
• Strasbaugh
• Lam Research

Main CMP Page
P.B.S.® Pad Conditioners for In-situ Metal CMP Processes
Infinity v6.1™ Optimized Pad Conditioners

CMP technical papers

Technical Papers and Product Brochure



WORLD HEADQUARTERS
Lewis Center, Ohio U.S.A.
Ph.  1.740.548.4100
Fax: 1.740.548.7617

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